X-ray Metrology for the Semiconductor Industry Tutorial

Description

Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry

Resources

Name Format Description Link
21 DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial https://doi.org/10.18434/T4/1503330

Tags

  • small-angle-x-ray-scattering
  • semiconductor-metrology
  • dimensional-metrology

Topics

Categories