Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds

Description

These are the unprocessed electron back scatter diffraction patterns (EBSPs) collected from the mesas of electron beam induced deposition (EBID) material, in addition to the Mathematica notebook used to process the images. Each of the 12 EBID mesa has 10 EBSPs collected at 20 kV and 10 kV, in addition to several longer line scans that step from the silicon substrate onto the EBID mesa.

Resources

Name Format Description Link
57 20kV-mesas.zip https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/20kV-mesas.zip
47 https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/20kV-mesas.zip.sha256
57 afmOfMesas.zip https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/afmOfMesas.zip
57 10kV-lineScans.zip https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/10kV-lineScans.zip
57 10kV-mesas.zip https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/10kV-mesas.zip
47 https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/10kV-mesas.zip.sha256
57 20kV-lineScans.zip https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/20kV-lineScans.zip
47 https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/20kV-lineScans.zip.sha256
47 readme.txt https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/readme.txt
47 https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/readme.txt.sha256
47 https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/10kV-lineScans.zip.sha256
29 fibColoring.nb https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/fibColoring.nb
47 https://data.nist.gov/od/ds/77D21EEB60F37A2BE053245706819FDB1978/fibColoring.nb.sha256
21 DOI Access to Supporting Data for Selected Area Beam Induced Deposition of Pt and W for EBSD Background https://doi.org/10.18434/T4/1503158

Tags

  • pt
  • flat-field
  • w_
  • electron-back-scatter-diffraction
  • electron-beam-induced-deposition
  • background-subtraction
  • ebsd
  • ebid

Topics

Categories