Patent AT-E401430-T1: [Translated] DIAMOND COATINGS ON REACTOR WALLS AND METHOD FOR THEIR PRODUCTION

Description

A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a diamond containing surface and process for manufacture thereof.

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21 Access the complete Patent AT-E401430-T1: [Translated] DIAMOND COATINGS ON REACTOR WALLS AND METHOD FOR THEIR PRODUCTION on the official website. https://pubchem.ncbi.nlm.nih.gov/patent/AT-E401430-T1

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  • patent
  • chemistry
  • research
  • innovation
  • pubchem

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