Patent AT-E401364-T1: [Translated] ORGANIC SILICATE POLYMER AND COMPREHENSIVE INSULATING FILM
Description
The present invention relates to an organic silicate polymer prepared by mixing silane compound with organic solvent to prepare a first mixture, and hydrolyzing and condensing the first mixture by adding water and catalyst, the first mixture being selected from a group consisting of oxidized hydrosilane, cyclic siloxane, a second mixture of oxidized hydrosilane and silane or silane oligomer, and a third mixture of cyclic siloxane and silane or silane oligomer, a composition for forming an insulation film of semiconductor devices prepared by using the organic silicate polymer, a method for preparing an insulation film using the composition, and a semiconductor device comprising the insulation film.
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Access the complete Patent AT-E401364-T1: [Translated] ORGANIC SILICATE POLYMER AND COMPREHENSIVE INSULATING FILM on the official website. |
https://pubchem.ncbi.nlm.nih.gov/patent/AT-E401364-T1 |
Tags
- patent
- chemistry
- research
- innovation
- pubchem