Patent AT-E400831-T1: [Translated] MICROFABRICATED MIRROR DEVICE
Description
A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
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Access the complete Patent AT-E400831-T1: [Translated] MICROFABRICATED MIRROR DEVICE on the official website. |
https://pubchem.ncbi.nlm.nih.gov/patent/AT-E400831-T1 |
Tags
- patent
- chemistry
- research
- innovation
- pubchem