Description
A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
Resources
| Name | Format | Description | Link |
|---|---|---|---|
| Official Data Source | HTML | Access the complete Patent AT-E400831-T1: [Translated] MICROFABRICATED MIRROR DEVICE on the official website. | Open resource |