Patent AT-E400672-T1: [Translated] METHOD FOR FORMING AN ANTIREFLECTION COATING
Description
Silsesquioxane resins useful in forming the antireflective coating having the formula (PhSiO(3-x)/2(OH)x)mHSiO(3-x)/2(OH)x)n(MeSiO(3-x)/2(OH)x)p(RSiO(3-x)/2(OH)x)q where Ph is a phenyl group, Me is a methyl group, R is selected from ester groups and polyether groups, x has a value of 0, 1 or 2; m has a value of 0.05 to 0.95, n has a value of 0.05 to 0.95, p has a value of 0.05 to 0.95, q has a value of 0.01 to 0.30 and m+n+p+q≈1.
Resources
| Name |
Format |
Description |
Link |
|
21 |
Access the complete Patent AT-E400672-T1: [Translated] METHOD FOR FORMING AN ANTIREFLECTION COATING on the official website. |
https://pubchem.ncbi.nlm.nih.gov/patent/AT-E400672-T1 |
Tags
- patent
- chemistry
- research
- innovation
- pubchem