Patent AT-393333-B: [Translated] ION PROJECTION DEVICE FOR SHADOW PROJECTION

Description

An ion-projecting apparatus which has between the ion source and the mask, directly proximal to the mask, at least one ion optical correction element in the form of a multipole with at least eight poles and so located that there is no other deflection means between the octapole and the mask.

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21 Access the complete Patent AT-393333-B: [Translated] ION PROJECTION DEVICE FOR SHADOW PROJECTION on the official website. https://pubchem.ncbi.nlm.nih.gov/patent/AT-393333-B

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  • patent
  • chemistry
  • research
  • innovation
  • pubchem

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