Shadow mask assisted 193 nm Excimer laser processing of commercial Cyclo-Olefin-Copolymer (COC) substrates for low-cost micro-fluidic biosensing devices.

Name: Shadow mask assisted 193 nm Excimer laser processing of commercial Cyclo-Olefin-Copolymer (COC) substrates for low-cost micro-fluidic biosensing devices.
Creator: EU Open Research Repository

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An Abstract submitted to The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Shadow mask assisted 193 nm Excimer laser processing of commercial Cyclo-Olefin-Copolymer (COC) substrates for low-cost micro-fluidic biosensing devices.

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