Tantalum thin films EUVR data
Description
Acknowledgements: The data uploaded here was collected within a project which has received funding from the Electronic Component Systems for European Leadership Joint Undertaking under grant agreement No 783247 – TAPES3 (Technology Advances for Pilot line of Enhanced Semiconductors for 3 nm) and from the EMPIR Metrology for Industry project under grant No 20IND04 – Traceable metrology of soft X-ray to IR optical constants and nanofilms for advanced manufacturing (ATMOC). This Joint Undertaking receives support from the European Union's Horizon 2020 research and innovation program alongside Netherlands, Belgium, Germany, France, Austria, United Kingdom, Israel, Switzerland.
Resources
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http://data.europa.eu/88u/dataset/oai-zenodo-org-7181799 |
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http://data.europa.eu/88u/dataset/oai-zenodo-org-7181799 |
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http://data.europa.eu/88u/dataset/oai-zenodo-org-7181799 |
Tags
- euv,-reflectivity,-tantalum-thin-films,-synchrotron-radiation