5D-NP-FABTECH_ALD - Open Dataset for: "Shedding light on the initial growth of ZnO during plasma-enhanced atomic layer deposition on vapor-deposited polymer thin films"

This is the open dataset for the paper: "Demelius, L. et al. Shedding light on the initial growth of ZnO during plasma-enhanced atomic layer deposition on vapor-deposited polymer thin films. Applied Surface Science 604, (2022)." This includes the supplementary information and all the source material that was used for the paper preparation. For each folder (sub-dataset), there exists a corresponding readme file describing the content and including material.