Data of paper Controlling the interfacial reactions and environment of rare-earth ions in thin oxide films towards wafer-scalable quantum technologies

Data of the figures in the paper : N. Harada, A. Tallaire, D. Serrano, A. Seyeux, P. Marcus, X. Portier, C. Labbé, P. Goldner, and A. Ferrier, Controlling the Interfacial Reactions and Environment of Rare-Earth Ions in Thin Oxide Films towards Wafer-Scalable Quantum Technologies, Mater. Adv. 3, 300 (2022). doi: 10.1039/D1MA00753J