Direct measurement of oxygen mass transport at the nanoscale

Dataset for article "Direct measurement of oxygen mass transport at the nanoscale". It contains: -  secondary ion mass spectrometry (SIMS) data for 18O concentration in thin films of lanthanum chromite (epitaxial and nanocrystalline); - atom probe tomography (APT) data for 18O fraction in thin films of nanocrystalline lanthanum chromite - top view transmission electron microscopy (TEM) data for nanocrystalline films of lanthanum chromite