The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO3(001), SrTiO3 (110), and SrTiO3 (111) substrates

Description

Datafiles for the Figures and Supplementary Material of the article "The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO3(001), SrTiO3 (110), and SrTiO3 (111) substrates" published in Applied Physics Letters by Alejandro E. Plaza et al. (2021)

Resources

Name Format Description Link
0 http://data.europa.eu/88u/dataset/oai-zenodo-org-4738478
0 http://data.europa.eu/88u/dataset/oai-zenodo-org-4738478

Tags

  • srtio3
  • oxides
  • etching
  • mems

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