Oxide Membranes from Bulk Micro-Machining of SrTiO3 substrates (Dataset)

Description

Dataset of the journal article "Oxide Membranes from Bulk Micro-Machining of SrTiO3 substrates"

Resources

Name Format Description Link
0 http://data.europa.eu/88u/dataset/oai-zenodo-org-13898651
0 http://data.europa.eu/88u/dataset/oai-zenodo-org-13898651

Tags

  • bulk-micromachining
  • oxide-membranes
  • oxide-mems
  • oxide-micromechanics
  • srtio3-etching

Topics

Categories