NIST SRM 2135c Hyperspectral Tomography Tilt Series

Energy dispersive X-ray spectroscopy (EDX) tomographic tilt series of a needle-shaped sample extracted from NIST SRM 2135c.Sample description: This SRM consists of alternating layers of nickel and chromium on a silicon substrate (see SRM certificate for further detail).Data description. The scan size for each spectrum image (SI) is 128 pixels x 100 pixels and 4000 spectral channels deep. EDX data were collected using the following parameters:Beam energy (keV): 300.0Probe current: 0.5 nAPixel size: 3.0 nmDwell time per pixel: 200 msecEnergy resolution: 10 eV/channelThe SI's were collected over a 180 degree range of specimen tilts with a 5 degree tilt step between each acquisition.