KLA stylus profilometry of Parylene C devices

Description

We obtained stylus profilometry measurements of Parylene C devices after soaking in different fluid conditions in a microfluidic environment. The Parylene C devices consist of platinum coplanar waveguides (400 nm Pt, 50 um center conductor, 5 um gaps, 200 um ground planes) with 6.5 um of Parylene C deposited on top. A PDMS microfluidic layer was aligned on top of the 10.00 mm CPW such that the 4.00 mm channel was centered on the CPW. The Parylene C device was subjected to one of three fluid conditions over a 2 month soaking period: H2O at 20 degrees Celsius, 1xPBS (phosphate-buffered saline) at 20 degrees Celsius, or 1xPBS at 37 degrees Celsius. The cross-sectional profile of the CPW was measured in three locations along the channel before and after soaking in each fluid. Here we give these topographical profiles for each Parylene C device we measured.

Resources

Name Format Description Link
47 2809_README_edit.txt https://data.nist.gov/od/ds/mds2-2809/2809_README_edit.txt
57 Cross-sectional profiles of Pt CPWs coated in Parylene C and soaked in different microfluidic fluid conditions. https://data.nist.gov/od/ds/mds2-2809/Profilometry.zip

Tags

  • s-parameters
  • dielectric-spectroscopy
  • profilometry
  • parylene-c
  • implantable-devices
  • biomedical-devices
  • microwave-microfluidic-spectroscopy

Topics

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