Supplementary materials for: "Scanning Electron Microscopy-based Automatic Defect Inspection for Semiconductor Manufacturing: A Systematic Review"
Description
This dataset contains supplementary materials for: "Scanning Electron Microscopy-based Automatic Defect Inspection for Semiconductor Manufacturing: A Systematic Review". More specifically, it provides (i) a document containing the full search commands used to identify records/papers, (ii) a spreadsheet of the screening results, (iii) a spreadsheet of the selected papers and their categorization results, and (iv) a BibTeX document with citations for the selected papers.
Resources
| Name |
Format |
Description |
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Tags
- optical-inspection
- electron-microscopy
- semiconductor-device-manufacture
- metrology
- computer-vision
- image-processing