Data for manuscript: Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography

Description

Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300.

Resources

Name Format Description Link
8 High-Q optical resonance indicated with an red arrow in (b) https://data.nist.gov/od/ds/mds2-2815/Fig4c_experimental_data.csv
8 Transducer non-contact noise spectral density S_d for two devices with different dimensions. Device with a 10 micrometer disk (upper, red) presents a lowest in-plane mode eigenfrequency of ?_0/2? ? 5 MHz and damping coefficient ?/2? ? 0.34 MHz while the 5 micrometer disk device (lower, blue) presents ?_0/2? ? 25 MHz and damping coefficient ?/2? ? 0.28 MHz. https://data.nist.gov/od/ds/mds2-2815/Fig4d_experimental_data_5um.csv
8 Broad wavelength scan for transverse magnetic (TM) polarized modes of a typical disk-cantilever device (w = 150 nm, G = 180 nm ) https://data.nist.gov/od/ds/mds2-2815/Fig4b_experimental_data.csv
8 Lorentzian fit Q=64000 https://data.nist.gov/od/ds/mds2-2815/Fig4c_fit_data.csv
8 Transducer non-contact noise spectral density S_d for two devices with different dimensions. Device with a 10 micrometer disk (upper, red) presents a lowest in-plane mode eigenfrequency of ?_0/2? ? 5 MHz and damping coefficient ?/2? ? 0.34 MHz while the 5 micrometer disk device (lower, blue) presents ?_0/2? ? 25 MHz and damping coefficient ?/2? ? 0.28 MHz. https://data.nist.gov/od/ds/mds2-2815/Fig4d_experimental_data_10um.csv

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  • integrated-photonics
  • cavity-optomechanical-sensors

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