Description
Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300.
Resources
| Name | Format | Description | Link |
|---|---|---|---|
| Experimental data for figure 4(b) | CSV | Broad wavelength scan for transverse magnetic (TM) polarized modes of a typical disk-cantilever device (w = 150 nm, G = 180 nm ) | Open resource |
| Experimental data for Figure 4c | CSV | High-Q optical resonance indicated with an red arrow in (b) | Open resource |
| Fit data for Figure 4c | CSV | Lorentzian fit Q=64000 | Open resource |
| Experimental data for figure 4d, 10 micrometer disk. | CSV | Transducer non-contact noise spectral density S_d for two devices with different dimensions. Device with a 10 micrometer disk (upper, red) presents a lowest in-plane mode eigenfrequency of ?_0/2? ? 5 MHz and damping coefficient ?/2? ? 0.34 MHz while the 5 micrometer disk device (lower, blue) presents ?_0/2? ? 25 MHz and damping coefficient ?/2? ? 0.28 MHz. | Open resource |
| Experimental data for Figure 4d, 5 micrometer disk | CSV | Transducer non-contact noise spectral density S_d for two devices with different dimensions. Device with a 10 micrometer disk (upper, red) presents a lowest in-plane mode eigenfrequency of ?_0/2? ? 5 MHz and damping coefficient ?/2? ? 0.34 MHz while the 5 micrometer disk device (lower, blue) presents ?_0/2? ? 25 MHz and damping coefficient ?/2? ? 0.28 MHz. | Open resource |