Data associated with manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement"

Description

This repository contains all of the data used in the manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement," by Thomas A. Germer, T. Brian Renegar, Ulf Griesmann, and Johannes A. Soons, which has been published in Surface Topography: Metrology and Properties volume 12, number 2, article 025012 on 8 May 2024. The repository also contains a Python Jupyter notebook that performs the analysis of the data and generates the figures in the manuscript.

Resources

Name Format Description Link
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5 50%20um%20step%20-%2006-07-2023%2F50%20um%20Linearity%20Test%20level11%20repeat01.datx https://data.nist.gov/od/ds/mds2-3116/50%20um%20step%20-%2006-07-2023%2F50%20um%20Linearity%20Test%20level11%20repeat01.datx
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47 README.txt https://data.nist.gov/od/ds/mds2-3116/README.txt
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5 Long%20Interferograms%20-%2002-10-2023%2FInterferogram%20145%20309.swlx https://data.nist.gov/od/ds/mds2-3116/Long%20Interferograms%20-%2002-10-2023%2FInterferogram%20145%20309.swlx

Tags

  • interferometry
  • scanning
  • microscopy
  • coherent

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