Data associated with manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement"

Description

This repository contains all of the data used in the manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement," by Thomas A. Germer, T. Brian Renegar, Ulf Griesmann, and Johannes A. Soons, which has been published in Surface Topography: Metrology and Properties volume 12, number 2, article 025012 on 8 May 2024. The repository also contains a Python Jupyter notebook that performs the analysis of the data and generates the figures in the manuscript.

Resources

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50 um step - 06-07-2023/50 um Linearity Test level19 repeat03 Binary 50%20um%20step%20-%2006-07-2023%2F50%20um%20Linearity%20Test%20level19%20repeat03.datx Open resource
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Analysis Binary Open resource
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