Data and scripts associated with "Quantification of STEM-in-SEM Energy Dispersive X-ray Spectra using Bulk Standards"

Description

Spectra measured from SRM-2063a and standards at 20 keV, 25 keV and 30 keV. Scripts for processing this data. Scripts for Monte Carlo simulating thin films of ADM-6005a and Al2O3 on CaF2 and for quantifying these simulated spectra.

Resources

Name Format Description Link
47 The read_me file associated with this data set. https://data.nist.gov/od/ds/mds2-2975/2975_README.txt
0 X-ray spectra and scripts in a zip file https://data.nist.gov/od/ds/mds2-2975/STEMinSEM.zip

Tags

  • thickness
  • stem-in-sem
  • bulk-standards
  • thin-films
  • nist-dtsa-ii-software
  • energy-dispersive-spectrometry-eds
  • quantitative-electron-excited-x-ray-microanalysis

Topics

Categories