An example data set to demonstrate the usage of M.o.R., a shiny app for model-based metrology.

Description

This data set consists of several files that were created to accompany M.o.R., a shiny app created by the Surface & Nanostructure Metrology Group in the Engineering Physics Division of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology. It was created to simplify model-based metrology. A detailed explanation of the proper usage can be found in the M.o.R. documentation.

Resources

Name Format Description Link
47 https://s3.amazonaws.com/nist-midas/1886/Mu.csv.sha256
47 Pi.csv https://s3.amazonaws.com/nist-midas/1886/Pi.csv
47 https://s3.amazonaws.com/nist-midas/1886/Pi.csv.sha256
47 Sigma.csv https://s3.amazonaws.com/nist-midas/1886/Sigma.csv
47 https://s3.amazonaws.com/nist-midas/1886/Sigma.csv.sha256
47 y.csv https://s3.amazonaws.com/nist-midas/1886/y.csv
47 https://s3.amazonaws.com/nist-midas/1886/y.csv.sha256
47 https://s3.amazonaws.com/nist-midas/1886/Phi.csv.sha256
21 DOI Access for 'An example data set to demonstrate teh usage of M.o.R., a shiny app for model-based metrology' https://doi.org/10.18434/T4/1426859
47 Mu.csv https://s3.amazonaws.com/nist-midas/1886/Mu.csv
47 Phi.csv https://s3.amazonaws.com/nist-midas/1886/Phi.csv

Tags

  • statistics
  • model-based-metrology

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