Name |
Format |
Description |
Link |
|
0 |
|
https://doi.org/10.18434/M32114 |
|
0 |
Solidworks assembly drawing of all layers for NIST Nanocalorimeter |
https://data.nist.gov/od/ds/mds2-2114/NIST%20Nanocalorimeter%20single%20die%203D%20model.SLDASM |
|
47 |
|
https://data.nist.gov/od/ds/mds2-2114/3D%20model%20NIST%20Nanocalorimeter%20sensor%20die%20layer.SLDPRT.sha256 |
|
0 |
Solidworks part drawing of silicon die layer for NIST Nanocalorimeter |
https://data.nist.gov/od/ds/mds2-2114/3D%20model%20NIST%20Nanocalorimeter%20sensor%20die%20layer.SLDPRT |
|
47 |
|
https://data.nist.gov/od/ds/mds2-2114/3D%20model%20NIST%20Nanocalorimeter%20sensor%20top%20metal%20layer.SLDPRT.sha256 |
|
47 |
|
https://data.nist.gov/od/ds/mds2-2114/NIST%20Nanocalorimeter%20single%20die%203D%20model.SLDASM.sha256 |
|
0 |
Solidworks part drawing of silicon nitride layer for NIST Nanocalorimeter |
https://data.nist.gov/od/ds/mds2-2114/3D%20model%20NIST%20Nanocalorimeter%20sensor%20silicon%20nitride%20layer.SLDPRT |
|
47 |
|
https://data.nist.gov/od/ds/mds2-2114/3D%20model%20NIST%20Nanocalorimeter%20sensor%20silicon%20nitride%20layer.SLDPRT.sha256 |
|
0 |
Solidworks part drawing of top metal layer for NIST Nanocalorimeter |
https://data.nist.gov/od/ds/mds2-2114/3D%20model%20NIST%20Nanocalorimeter%20sensor%20top%20metal%20layer.SLDPRT |